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Chip Furnace Annealing

Time • 2023.07.16
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Heat treatment, also known as annealing, is a common step in the semiconductor fabrication process. A buildup of radiation-induced localized charge within the semiconductor and insulator alters local field distribution, threshold voltage, and leakage current. VICORV's patent-pending technology implements an annealing process on a system level directly on a chip for annealing defects and improving device performance with heating done in the laboratory.

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